O-RING,VITON,376B021QTA,BRKSAUTO

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Spare parts
Part name O-RING
Manufacturer part number 376B021QTA
Manufacturer BROOKS AUTOMATION
Material VITON

Equipment name VARIABLE AREA FLOWMETER
Tech ID 132FI-10032/G
134FI-10010/G
182FI-10020/G
182FI-10021/G
184FG-10022/G
184FG-10024/G
184FG-10026/G
184FG-10028/G
184FG-10032/G
184FG-10034/G
111FI-10035/G
111FI-10045/G
130FI-10035/G
131FI-10035/G
211FI-10035/G
211FI-10045/G
284FG-10022/G
284FG-10024/G
284FG-10026/G
284FG-10028/G
284FG-10032/G
284FG-10034/G
282FI-10020/G
282FI-10021/G
231FI-10035/G
232FI-10032/G
234FI-10010/G
230FI-10035/G
Document ID T4015894RevD_F002